Private Sub Button1_Click(ByVal sender As System.Object, ByVal e As _
  System.EventArgs) Handles Button1.Click        
Dim ExcelTemp As Object
Dim BookTemp As Object
Dim SheetTemp As Object
ExcelTemp = CreateObject("Excel.Application")
BookTemp = ExcelTemp.Workbooks.add
SheetTemp = BookTemp.Worksheets(1)
 
        Dim z As Integer = 1
        Dim s As Integer = 1
        Dim zahl As Integer = 0
        Dim xl_chart As Object
 
        While z <> 10
            While s <> 5
                SheetTemp.Cells(z, s) = zahl
                zahl = zahl + 1
                s = s + 1
            End While
            s = 1
            z = z + 1
        End While
'Jetzt soll ein Diagramm erstellt werden
 
ExcelTemp.Visible = True
 
        SheetTemp = Nothing
        BookTemp = Nothing
        ExcelTemp = Nothing
 
End Sub

BookTemp.Charts.Add()

ExcelTemp.Charts.Add()

SheetTemp.shapes.addchart.select()